Technology Introduction

Nanosilicon anodic oxidation technology"e-COOL"
Entrusted joined and customized Manufacturing/Development
Bio / Medical application Electron emitting device
Luminescent silicon Crystalline silicon solar cell/Semiconductor process application

Nanosilicon anodic oxidation technology"e-COOL"

e-COOL

electro-Chemical Oxidation Originated Liquescent


Nanocrystalline silicon fabrication technology based on standard semiconductor industrial wet process. The energy efficiency is higher than equivalent dry processes such as plasma process. Energy efficiency as high as 70% is achievable during electrochemical silicon crystal etching. This technology hold promise as a low energy and ecological process under 100 Celsius.

e-COOL



Examples of Nano-silicon

[Nano-silicon ,Example of surface structure]

Nano-silicon ,Example of surface structure

[Nano-silicon ,Example of intersection structure]


[Example of Porous silicon]



Nanosilicon anodic oxidation technology"e-COOL"
Entrusted joined and customized Manufacturing/Development
Bio / Medical application Electron emitting device
Luminescent silicon Crystalline silicon solar cell/Semiconductor process application

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